Semi-Automated System
The Nexus System delivers exceptional flexibility and efficiency by combining both linear and rotational robotic motion to move wafer cassettes to any programmed destination. Its advanced robotics allow smooth side-to-side travel and front-to-back positioning through a compact rotational mechanism, enabling a significantly smaller overall system footprint compared to traditional linear designs. This innovative approach maximizes cleanroom space while maintaining high throughput and reliable wafer handling performance.
Advanced Technologies & Enhancements
Megasonic Process Tanks
High-frequency acoustic energy for superior particle removal and advanced cleaning efficiency.
Ultrasonic Process Tanks
Uniform agitation technology for consistent cleaning, rinsing, or etching performance.
High-Performance Recirculation Tanks
Precision engineered for stable thermal control, clean chemical flow, and repeatable process performance.
Automated Chemical Dosing / Spiking
Closed-loop precision delivery for maintaining ideal chemistries during operation.
Bulk or On-Board Chemical Delivery
Flexible supply options for new or existing facility infrastructure.
Optional Integrated Pump-Out System
On-board chemical evacuation directly to facility collection or waste systems.
Load & Unload Platforms
Ergonomic staging areas that streamline cassette handling and operator workflow.
Integrated NexChem Delta Marangoni Dryer
Enables true dry-in / dry-out operation, reducing handling steps and maximizing throughput.
Fire Suppression System
Automatic detection and suppression system for enhanced safety and code compliance.
Ready to configure your Nexus Series?
Submit a Request for Quote to start a conversation with our application engineers. We'll help you find the right configuration for your specific process needs.